Anomalous Hg IN-Diffusion in MCT (x=0.2) During Low Temperature Hg Saturation Annealing

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-03-15

著者

• Singh V

  Tohoku Univ. Sendai Jpn

• SHARMA Rajesh

  Solid State Physics Laboratory, Lucknow Road

• SINGH Vinod

  Solid State Physics Laboratory, Lucknow Road

• SHARMA Braj

  Solid State Physics Laboratory, Lucknow Road

• Sharma Braj

  Solid State Physics Laboratory Lucknow Road

• Singh Vinod

  Solid State Physics Laboratory Lucknow Road

• Sharma Rajesh

  Solid State Physics Laboratory Lucknow Road

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• Flow Condition in Resist Spray Coating and Patterning Performance for Three-Dimensional Photolithography over Deep Structures
• Heating Effect on Photoresist in Spray Coating Technique for Three-Dimensional Lithography
• Anomalous Hg IN-Diffusion in MCT (x=0.2) During Low Temperature Hg Saturation Annealing

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