Annealing Transformation of Diamond-Like Carbon Using Ni Catalyst
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概要
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We have considered diamond-like carbon (DLC) graphitization by low-temperature annealing with a Ni catalyst, for MEMS usage with thick DLC films. For DLC films, annealing at 350--450 °C was effective for improving the I(D)/I(G) ratio of their Raman spectra, and their surface roughness was unaffected by the annealing temperature.
- 2013-12-25
著者
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Sone Junji
Faculty Of Engineering Tokyo Polytechnic University
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YAMADA Katsumi
Faculty of Agriculture, Shimane University
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Tanaka Shuji
Graduate School Of Eng. Tohoku University
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Tanaka Shuji
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Uchida Takayuki
Faculty of Engineering, Tokyo Polytechnic University, Astugi, Kanagawa 243-0297, Japan
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Shigeta Naoto
Faculty of Engineering, Tokyo Polytechnic University, Astugi, Kanagawa 243-0297, Japan
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Yoshida Shinya
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Hayasaka Takeshi
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Yamada Katsumi
Faculty of Engineering, Tokyo Polytechnic University, Astugi, Kanagawa 243-0297, Japan
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