Feasibility Study for Designing a Parylene Actuator for Nano-positioning
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概要
- 論文の詳細を見る
We considered a polymer-based piezoelectric stack actuator that is based on MEMS nano-positioning technology. We studied the structure of the actuator and important parameters of the actuation design. We used FEM to simulate the electric field, deformation and resonance frequency. On the basis of this simulation, we established the appropriate parameters for the actuator.
著者
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Jalabert Laurent
Limms/cnrs-iis And Cirmm University Of Tokyo
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FUJITA Hiroyuki
Institute of Industrial Science, The University of Tokyo
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Sone Junji
Faculty Of Engineering Tokyo Polytechnic University
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Fujita Hiroyuki
Institude Of Industrial Science The University Of Tokyo Fujita Lab.
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