Atomic Force Microscope Cantilever Array for Parallel Lithography of Quantum Devices

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概要

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• Arrayed atomic force microscope (AFM) cantilevers for parallel scanning probe lithography (SPL) have been fabricated by silicon micromachining. Fabrication is based on three KOH etching steps and local oxidation processes. The curvature radius of the tips is as sharp as 20 nm. A laser beam focused onto the middle probe enables us to observe the wafer for alignment and confirm the patterns after the SPL operation. Parallel SPL on $N$-octadecyltrimethoxysilane (ODS) self-assembled monolayer (SAM) films is susessfully demonstrated with five probes. Good alignment and homogeneity are obtained with simple operation. Parallel SPL for parallel quantum device fabrications is also reported.

• 2004-06-15

著者

• Kakushima Kuniyuki

  Institude Of Industrial Science The University Of Tokyo Fujita Lab.

• HASHIGUCHI Gen

  Kagawa University

• WATANABE Toshiyuki

  Ritsumeikan University

• SHIMAMOTO Kouji

  Ritsumeikan University

• GOUDA Takushi

  Kagawa University

• MIMURA Hidenori

  Shizuoka University

• ISONO Yoshimasa

  Ritsumeikan University

• MIHARA Yutaka

  Kagawa University

• Ataka Manabu

  Institue Of Industrial Science The University Of Tokyo

• Fujita Hiroyuki

  Institude Of Industrial Science The University Of Tokyo Fujita Lab.

• Shimamoto Kouji

  Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu-shi, Shiga 525-8577, Japan

• Kakushima Kuniyuki

  Institue of Industrial Science, the University of Tokyo, 4-6-1 Komaba, Meguro-ku Tokyo 153-8505, Japan

• Gouda Takushi

  Kagawa University, 2217-20 Hayashi-cho, Takamatsu-shi, Kagawa 761-0396, Japan

• Hashiguchi Gen

  Kagawa University, 2217-20 Hayashi-cho, Takamatsu-shi, Kagawa 761-0396, Japan

• Isono Yoshimasa

  Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu-shi, Shiga 525-8577, Japan

• Ataka Manabu

  Institue of Industrial Science, the University of Tokyo, 4-6-1 Komaba, Meguro-ku Tokyo 153-8505, Japan

• Mimura Hidenori

  Shizuoka University, 3-5-1 Johoku Hamamatsu 432-8011, Japan

• Fujita Hiroyuki

  Institue of Industrial Science, the University of Tokyo, 4-6-1 Komaba, Meguro-ku Tokyo 153-8505, Japan

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