Recent Progress in Micromachining and Applications to Microactuators
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概要
- 論文の詳細を見る
The successful fabrication and operation of microactuators and micromechanical parts by IC-basedmicro machining technology has provided the opportunity to produce microelectromechanical systems (MEMS) or micromachines. This paper deals with the recent progress in micromachining processes and microactuators fabricated by them. A system architecture suitable for MEMS and applications of MEMS are also discussed.
- 社団法人応用物理学会の論文
- 1994-12-30
著者
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Fujita Hiroyuki
Institude Of Industrial Science The University Of Tokyo Fujita Lab.
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Fujita Hiroyuki
Institute Of Industrial Science The University Of Tokyo
関連論文
- Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon Chip
- A Digital-to-Analog Converter of Displacement by an Integrated Micromechanism
- Electromechanical Analysis of a Micromachined Comb-Drive Actuator by Admittance Measurement
- Fabrication of an Inverted Scratch-Drive-Actuator for a Pwerful and Precise Conveyance System
- 印加電圧の瞬時停止を利用したAFM陽極酸化によるSiナノギャップの作製方法
- Electrical Conductivity of Lambda DNA-Pd Wire
- Impact Microactuator Driven by Electrostatic Force
- Fabrication of Silicon-Based Filiform-Necked Nanometric Oscillators
- Dry-Released Nickel Micromotors with Low-Friction Bearing Structure
- Optical coherence tomography by all-optical MEMS fiber endoscope
- Electroplated and Dry-Released Metallic Microstructures for a Lateral Tunneling Unit Application
- Contact resistance modeling of MEMS scanner for CMOS-MEMS simultaneous simulation (集積回路)
- A Piezoelectric Quartz Microactuator for a Large Pseudo-Static Displacement
- FEM Analysis of Mechanical Characteristics of Nano Tweezers with MemsOne^
- A Silicon Based Nanometric Oscillator for Scanning Force Microcopy Operating in the 100 MHz Range
- Fabrication of Array of Hollow Microcapillaries Used for Injection of Genetic Materials into Animal/Plant Cells
- Photoresist-Assisted Release of Movable Microstructures
- Monolithic Fabrication and Electrical Characteristics of Polycrystalline Silicon Field Emitters and Thin Film Transistor
- Fabrication and Emission Characteristics of Polycrystalline Silicon Field Emitters
- A Built-in Vibration Sensor Using Arc-Discharged Reactive Ion Plated PZT
- Micro Roll-to-Roll Patterning Process and Its Application on Flexible Display
- Two-dimensional conveyance system using cooperative motions of many fluidic microactuators
- Multiphysics Analysis for Micro Electromechanical Systems Based on Electrical Circuit Simulator
- Micro Mechanical Acoustic Sensor toward Artificial Basilar Membrane Modeling
- Optical MEMS(Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
- Recent Progress in Micromachining and Applications to Microactuators
- Micromachines for Cell Manipulation
- Recent MEMS Research Activities in Japan (Special Issue on Micromachine Technology)
- SiO_2 Electret Generated by Potassium Ions on a Comb-Drive Actuator
- Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware
- An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation
- Atomic Force Microscope Cantilever Array for Parallel Lithography of Quantum Devices
- Feasibility Study for Designing a Parylene Actuator for Nano-positioning
- Design of a Nano-Displacement No-Wiring Solid Actuator
- Electrical Conductivity of Lambda DNA–Pd Wire
- Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon Chip
- A micromachined voltage controlled oscillator using the pull-in mechanism of electrostatic actuation