Micro Roll-to-Roll Patterning Process and Its Application on Flexible Display
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概要
- 論文の詳細を見る
Novel electrode patterning techniques on thin polymer substrates were developed on a roll-to-roll (reel-to-reel, R2R) printing system. Hot embossing, laser ablation, and lift-off processes were evaluated for mass production for active-matrix display arrays with 1000 μm display pixels by using the concept of micro electro mechanical system (MEMS) Fabry–Perot etalon. Among which, the newly developed lift-off flexography process provided the best pattern integrity with 100 μm resolution. The demonstrator of display array proved R2R printing system’s possibility and capability under 1 m/s speed. A complete multilayer stack demonstration with alignment process also indicated its variable application. Further actuation for the MEMS display proved the robustness of device made by printing techniques.
- 2009-06-25
著者
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Toshiyoshi Hiroshi
Institute Of Industrial Science The University Of Tokyo
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Fujita Hiroyuki
Institude Of Industrial Science The University Of Tokyo Fujita Lab.
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Toshiyoshi Hiroshi
Institute of Industrial Science, University of Tokyo, Meguro, Tokyo 153-8505, Japan
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Lo Cheng-Yao
Institute of Industrial Science, University of Tokyo, Meguro, Tokyo 153-8505, Japan
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Kiitola-Keinanen Johanna
VTT Technical Research Centre of Finland, Oulu 90571, Finland
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Huttunen Olli-Heikki
VTT Technical Research Centre of Finland, Oulu 90571, Finland
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Petäjä Jarno
VTT Technical Research Centre of Finland, Oulu 90571, Finland
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Hast Jukka
VTT Technical Research Centre of Finland, Oulu 90571, Finland
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Maaninen Arto
VTT Technical Research Centre of Finland, Oulu 90571, Finland
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Kopola Harri
VTT Technical Research Centre of Finland, Oulu 90571, Finland
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