Contact resistance modeling of MEMS scanner for CMOS-MEMS simultaneous simulation (集積回路)
スポンサーリンク
概要
- 論文の詳細を見る
As an example of the advantage of CMOS-MEMS system, we present a MEMS scanning mirror combined with its control circuits. A MEMS scanner with the control circuit has been designed to oscillate at its resonance based on a phase locked loop (PLL), where the scanner has maximum amplitude. The whole system was simulated by HSpice with the simple model of MEMS scanner, and was proven that the controller automatically kept tracks on the resonant frequency. The scanner model is based on the change of piecewise linear contact resistance according to its driving signal plus RLC tank for phase delay. The scanner was fabricated by electroplating for future integration. The CMOS controller was designed by 1.2μm technology.
- 2008-12-04
著者
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Fujita Hisanori
Institute Of Laser Engineering Osaka University
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藤田 寛治
佐賀大学
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TOSHIYOSHI Hiroshi
Institute of Industrial Science, The University of Tokyo
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FUJITA Hiroyuki
Institute of Industrial Science, The University of Tokyo
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Fujimori Hiroyasu
Institute Of Material Research Tohoku University
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Toshiyoshi Hiroshi
Iis. Univ. Of Tokyo
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Toshiyoshi Hiroshi
Institute Of Industrial Science The University Of Tokyo
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Toshiyoshi Hiroshi
3rd Department Institute Of Industrial Science University Of Tokyo
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Fujita Hideki
Institute Of Plasma Physics Nagoya University
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Fujita H
Jfcc
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Fujita Hideki
Electric Power Research & Development Center Chubu Electric Power Co. Inc.
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Fujita H
Center For International Research On Micromechatronics (cirmm) Institute Of Industrial Science (iis)
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Fujita H
Limms/cnrs-iis The University Of Tokyo Crest/jst
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Fujita Hiroyuki
Institude Of Industrial Science The University Of Tokyo Fujita Lab.
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Fujita Hiroyuki
Inst. Of Industrial Sci. The Univ. Of Tokyo
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Yi Yuheon
Institute of Industrial Science The University of Tokyo
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Toshiyoshi Hiroshi
Inst. Of Industrial Sci. The Univ. Of Tokyo
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藤田 寛治
Institute Of Industrial Science The University Of Tokyo
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藤田 寛治
佐賀大学理工
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