Recent MEMS Research Activities in Japan (Special Issue on Micromachine Technology)
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概要
- 論文の詳細を見る
Micromechanisms and actuators which are 10-100 micrometers in size are studied by research groups in universities, national research institutes, and private industries in Japan. Some of them belong to a "Micromachine Technology" project lead by MITI (Ministry of International Trade and Industries). Microfabrication technologies based on both IC-compatible processes and mechanical machining are under development. Appication-oriented devices in automobile, communication and information industries are also investigated. The research goal is to build a smart micro system through the integration of moving mechanisms, sensors and electronics on a chip; this is the fusion of mechanics and electronics in the microscopic world. This paper reviews recent activities in MEMS research in Japan.
- 一般社団法人電子情報通信学会の論文
- 1997-02-25
著者
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Fujita Hiroyuki
Institude Of Industrial Science The University Of Tokyo Fujita Lab.
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Fujita Hiroyuki
Institute Of Industrial Science The University Of Tokyo
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