Design of a Nano-Displacement No-Wiring Solid Actuator
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概要
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In this paper, we considered a polymer-based piezoelectric stack actuator based on MEMS nano-positioning technology. A no-wiring structure was used for simplicity of fabrication and to avoid irregularity deformation under wiring. We selected the key parameters for actuation design, and a simulation was executed through FEM analysis of the electric field and deformation. From this simulation, we decided upon the appropriate parameters of the actuator.
著者
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Jalabert Laurent
Limms/cnrs-iis And Cirmm University Of Tokyo
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FUJITA Hiroyuki
Institute of Industrial Science, The University of Tokyo
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Fujita Hiroyuki
Institude Of Industrial Science The University Of Tokyo Fujita Lab.
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Sone Junji
Tokyo Polytechnic Univ. Fac. Of Engineering
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SONE Junji
Tokyo Polytechnic University, Faculty of Engineering
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