FEM Analysis of Mechanical Characteristics of Nano Tweezers with MemsOne^<TM>
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概要
- 論文の詳細を見る
In this study, we investigate improvements in silicon nanotweezers used to handle DNA molecules. We analyzed the deformation and frequency properties of the nanotweezers by finite element method (FEM) analysis. From this analysis, we determined the appropriate operation area of the nanotweezers.
- 社団法人 電気学会の論文
- 2008-05-01
著者
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Collard Dominique
Institute Of Industrial Science The University Of Tokyo
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Collard Dominique
Institute D'electronique Et De Microelectronique Du Nord France
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Miura Hirofumi
Faculty Of Engineering Tokyo Polytechnic University
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FUJITA Hiroyuki
Institute of Industrial Science, The University of Tokyo
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Yamahata Christophe
The University Of Tokyo
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Sone Junji
Faculty Of Engineering Tokyo Polytechnic University
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Sone Junji
Tokyo Polytechnic University
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FUJITA Hiroyuki
The University of Tokyo
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YAMAHATA Christophe
Institute of Industrial Science, The University of Tokyo
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Fujita Hiroyuki
Institude Of Industrial Science The University Of Tokyo Fujita Lab.
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