Design, Fabrication and Operation of a Micromachined Tunneling Control Unit

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概要

• 論文の詳細を見る

• We developed a micro tunneling unit, a device which can control the magnitude of a tunneling current that passes through a vacuum gap by adjusting the gap distance with a microactuator. Since the unit has a tunneling tip in the direction lateral to the substrate, we call it a lateral tunneling unit (LTU). Because of its layout and fabrication process, the LTU is suitable for integrating with each other or with other microstructures on a single substrate. This paper describes the design, the fabrication, and an experimental result which shows LTUs ability to control tunneling current.

• 社団法人 電気学会の論文

著者

• FUJITA Hiroyuki

  The University of Tokyo

• Kobayashi Dai

  The University of Tokyo

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