Two Dimensional Micro Magnetic Sensor Array
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概要
- 論文の詳細を見る
This paper proposes two new kinds of two dimensional micro magnetic sensor arrays, which are designed for a position sensor in a micro superconducting magnetic conveyance system with feedback control. One is a magnetic switch array with a nickel cantilever structure fabricated by electro-plating. Another one is a Hall sensor array consisted of so-called a MOS-Hall element, which is a MOS device in fact, but works as a Hall element. We have fabricated these two different types of sensor arrays by micromachining process, and tested their performances. The sensing principle, fabrication process and experimental results are reported.
- 社団法人 電気学会の論文
- 1998-11-01
著者
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FUJITA Hiroyuki
The University of Tokyo
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Chun Kyoseok
The University Of Tokyo
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Li Desheng
The University Of Tokyo
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IIZUKA Tetsuhiko
The University of Tokyo
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