The Reshaping Technology for Three Dimensional Polysilicon Microstructures (特集:マイクロマシン加工技術)

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概要

• 論文の詳細を見る

• This paper presents a new reshaping technology which is suitable to realize real three dimensional silicon microstructures. In this process, the elastically deformed polysilicon structure is annealed by Joule heating generated by the current passing through the structure. Plastic deformation occurs resulting in permanent three dimensional shapes. The application of this basic process to different polysilicon structures is successfully performed. Some quantitative characteristics of the annealing effects are also investigated by means of structure deformation measurements.

• 社団法人 電気学会の論文

著者

• FUJITA Hiroyuki

  The University of Tokyo

• Fukuta Y

  Univ. Tokyo Tokyo Jpn

• Fukuta Yamato

  The University Of Tokyo

• AKIYAMA Terunobu

  The University of Tokyo

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