A Built-in Vibration Sensor Using Arc-Discharged Reactive Ion Plated PZT
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概要
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A piezoelectrically excited micro cantilever with multiple electrode ports has been developed as a standard test device to investigate the piezoelectric oscillation sensing capability. A 5 μm thick PZT was deposited by the arc-discharge reactive ion plating on a 20-μm-thick and 2700-μm-long SOI cantilever, and its piezoelectrically measured vibration signal was correlated with the reference oscillation signal from the laser Doppler vibrometer to prove the feasibility as oscillation detector. An equivalent circuit expression for the sensing electrode has been found.
- 2011-03-01
著者
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TOSHIYOSHI Hiroshi
Institute of Industrial Science, The University of Tokyo
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FUJITA Hiroyuki
Institute of Industrial Science, The University of Tokyo
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Tani Masanao
Research And Development Center Stanley Electric Co. Ltd.
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Toshiyoshi Hiroshi
Institute Of Industrial Science The University Of Tokyo
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Tani M
Research And Development Center Stanley Electric Co. Ltd.
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AKAMATSU Masahiro
Research and Development Center Stanley Electric Co., Ltd.
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YASUDA Yoshiaki
Research and Development Center Stanley Electric Co., Ltd.
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Yasuda Yoshiaki
Research And Development Center Stanley Electric Co. Ltd.
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Fujita Hiroyuki
Institude Of Industrial Science The University Of Tokyo Fujita Lab.
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Fujita Hiroyuki
Institute Of Industrial Science The University Of Tokyo
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Akamatsu M
Research And Development Center Stanley Electric Co. Ltd.
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BARAN Utku
Optical MEMS Laboratory, Koc University
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Baran Utku
Optical Mems Laboratory Koc University
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