Fast Deposition of Lead-Zirconate-Titanate Thick Films by Arc Discharged Reactive Ion-Plating Method
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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Tani Masanao
Research And Development Center Stanley Electric Co. Ltd.
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Tani M
Research And Development Center Stanley Electric Co. Ltd.
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AKAMATSU Masahiro
Research and Development Center Stanley Electric Co., Ltd.
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YASUDA Yoshiaki
Research and Development Center Stanley Electric Co., Ltd.
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Yasuda Yoshiaki
Research And Development Center Stanley Electric Co. Ltd.
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Akamatsu M
Research And Development Center Stanley Electric Co. Ltd.
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- Fast Deposition of Lead-Zirconate-Titanate Thick Films by Arc Discharged Reactive Ion-Plating Method
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