Optical MEMS(Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
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概要
- 論文の詳細を見る
Recently the applications of MEMS(micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pigtailed tunable filters and two-dimensional MEMS optical scanners are described.
- 社団法人電子情報通信学会の論文
- 2000-09-25
著者
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TOSHIYOSHI Hiroshi
Institute of Industrial Science, The University of Tokyo
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Toshiyoshi Hiroshi
Institute Of Industrial Science The University Of Tokyo
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Fujita Hiroyuki
Institude Of Industrial Science The University Of Tokyo Fujita Lab.
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