SiO_2 Electret Generated by Potassium Ions on a Comb-Drive Actuator
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概要
- 論文の詳細を見る
- 2011-11-25
著者
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HASHIGUCHI Gen
Research Institute of Electronics Shizuoka University
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Aoyama Mitsuru
Research Institute Of Electronics Shizuoka University
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Ataka Manabu
Institue Of Industrial Science The University Of Tokyo
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Ataka Manabu
Institute Of Industrial Science The University Of Tokyo
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Fujita Hiroyuki
Institude Of Industrial Science The University Of Tokyo Fujita Lab.
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Sugiyama Tatsuhiko
Research Institute Of Electronics Shizuoka University
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Shibata Yasushi
Research Institute Of Electronics Shizuoka University
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SUZUKI Masato
AOI Electronics Co., Ltd.
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KONNO Takashi
AOI Electronics Co., Ltd.
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Konno Takashi
Aoi Electronics Co. Ltd.
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Suzuki Masato
Aoi Electronics Co. Ltd.
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