1112 半導体レーザビームの形状整形用マイクロコリメータレンズの製作(要旨講演,マイクロメカトロニクス)

概要

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This paper describes a new fabrication process of a micro elliptical collimator lens to form a beam shape for a LD (Laser Diode). The beam shape of LD is an ellipse because the divergent light angle is different between horizontal and vertical direction. In this presentation, we propose the lens to form the divergent light of an elliptical beam shape to the collimated light of a circular beam shape. For this purpose, we designed one lens, which has different curvature radiuses between the incident and the output surfaces. In the incident surface, the divergent light is formed to the convergent light, and the convergent light is formed to the collimated light in the output surface. We simulated the optical, characteristic of this lens, and designed for various parameters. In order to fabricate this lens, we propose a new process using a chemically absorbed monomolecular layer, which has an excellent hydrophobic property. This layer is patterned and deposited by a photolithographic technique. Next, we drop a UV (Ultra Violet) cure material on the hydrophilic area, as the result, we can fabricate a micro elliptical lens shape. The formed lens shapes are transferred by the electro-plating and then the micro dies are fabricated. By using this micro die, we can fabricate the micro elliptical lens.
社団法人日本機械学会の論文
2007-03-19