マイクロマシン技術を用いた小型光学式マルチガスセンサ [ I ]:－超厚膜樹脂を用いた高精度なマイクロ光学ベンチの製作－

概要

論文の詳細を見る
In order to realize the miniaturization of the optical gas sensors by the passive alignment of optical components, we proposed a micro-optical bench which consists of a guiding groove and a micro-mirror with an ultra-thick resin structure. We fabricated the micro-optical bench with an ultra-thick resin structure of 2 mm height and processing accuracy of within ±10 µm. By using this micro-optical bench, compact optical multi-gas sensors (size: 3 cm×3 cm) by the passive alignment through a guiding groove for a ball lens and a fiber ferrule were realized.