3304 圧電薄膜を用いた形状可変ミラーのFEM解析による設計(J26-1 マイクロメカトロニクス(1),J26 マイクロメカトロニクス)

概要

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Piezoelectric deformable mirror for adaptive optics is studied as an adaptive optics device. We have studied the piezoelectric mirror which have 19 upper electrodes. To improve the accuracy of the deformable mirror, we designed two upper electrode types, hexagonal electrodes 37ch and coaxial electrodes 35ch. To compare two electrode types, we calculated deflection of the designed mirrors by using Finite Element Method analysis simulation software, MSC. Marc. Zernike polynomials are used to evaluate the mirror surface, and the control system is based on the influence functions for generating Zernike modes. To compared with three electrodes types, 37ch, 35ch and 19ch, the residual RMS of hexagonal electrodes 37ch was the smallest, less than 0.005μm.
社団法人日本機械学会の論文
2007-09-07