MP-50 Ti基板上に成膜したPZT薄膜駆動の圧電MEMSスキャナーミラーに関する研究(ポスターセッション)

概要

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We have developed Ti-based piezoelectric MEMS scanner mirrors driven by PZT thin films. The 2μm-thick PZT thin films were directly deposited on 50μm-thick Ti substrates by RF-magnetron sputtering. The Ti substrates were preliminary microfabricated into the shape of the horizontal scanner by wet etching, therefore we could fabricate piezoelectric microactuators without photolithographic process. We could confirm strong diffraction peaks corresponding to perovskite PZT without a pyrochlore phase by XRD, which indicates that the polycrystalline PZT films with perovskite structures were grown on Ti substrates. We achieved a mechanical tilt angle of 10.0° at resonant frequency of 23.7kHz by driving voltage of 10V_<pp>. These horizontal scanning properties would be applicable for the laser displays.
一般社団法人日本機械学会の論文
2011-09-25