D-2-1 ナノインプリントリソグラフィとUVリソグラフィの融合によるバイオアッセイ用サブマイクロ灌流デバイスの作製(D-2 設計・プロセス,口頭発表:マイクロナノメカトロニクス)

概要

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Recently, micro/nano fabrication techniques are applied to bio-assay for detailed biochemical analysis. For example, studies about single molecule enzymology by femtoliter PDMS chambers and real-time imaging of single molecule fluorescence in quartz nano wells are reported. But, these conventional devices for nano-bio assays have difficulties in perfusing solutions in nano structures, so we developed a simple fabrication process of sub-microchannel and microchannel by integrating nanoimprint lithography and UV lithography. The fabricated device consists of sub-microchannel array and two microchannels. These microchannels are used as inlet or outlet of sub-microchannel to deliver solutions. We achieved water injection and solution exchange in 2-μm channels. Water injection pressure was 100 kPa for 1-μm channels and 120 kPa for 2-μm channnels.
2011-03-18