2107 圧電薄膜を用いた高解像度形状可変MEMSミラーに関する研究(要旨講演,一般セッション:マイクロナノメカトロニクス)

概要

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Piezoelectric MEMS deformable mirror resolution is studied for an adaptive optics device. In previous study, we have developed the piezoelectric MEMS deformable mirrors which have 19 actuator away. To improve the resolution of the deformable mirror, we designed the best electrode size to deflect 5μm when applied 10Vpp. Then, we compared 61CH electrodes with 91CH electrodes in terms of Zernike generation. Zernike polynomials are used to evaluate the mirror surface, and the control system is based on the influence functions for generating Zernike modes. As a result of simulation, we proposed 61CH hexagonal electrodes. The displacement profiles measurements by a laser Doppler vibrometer showed that the each actuator generated displacement of 1.0μm〜1.3μm at 10V. Furthermore we calculated residual RMS of Zernike modes(〜27th) of fabricated deformable mirror.
社団法人日本機械学会の論文
2008-03-17