310 圧電薄膜を用いた流路壁面振動送液デバイスの特性評価(T02-1 マイクロナノメカトロニクス(1),大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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In this paper, we propose and study innovative liquid pimping devices for microfluidic systems such as pTAS. In our study, microchaimels with vibrating wall were fabricated on silicon on insulator (SOI). The vibrating wall was composed of piezoelectric PZT thin films deposited on the microchannel wall. The microchannel can transport liquid by traveling wave induced on channel wall by applying sinusoidal voltages to each patterned top electrodes with different phase. The active microchannel of 200μm wide was fabricated by the deep reactive ion etching(DRIE) process. The displacement profiles of the vibrating wall and frequency response were measured by a laser Doppler vibrometer. We examined the difference of the characteristics that were the to the effect of the structure of channel wall.
社団法人日本機械学会の論文
2008-08-02