3302 圧電薄膜を用いた流体搬送機能を有するマイクロチャネルの開発(J26-1 マイクロメカトロニクス(1),J26 マイクロメカトロニクス)

概要

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In this paper, we propose an innovative fluid transport system for μTAS. In this system, microchannels fabricated on silicon chips have active wall of a piezoelectric thin film directly deposited by sputtering on the outside of the microchannels. The active microchannel can transport the fluid by traveling wave induced on the surface of the piezoelectric moving wall by applying sinusoidal voltages to each patterned top electrode with different phase. Since the active microchannel was fabricated by micromachining process and has simple structure without valves and diffuser, it can be applied to μTAS without occupied area. The fluid transport system can be driven by low electric voltage, and integrated with intricate network design.
社団法人日本機械学会の論文
2007-09-07