5504 細胞計測用マイクロチップ作製を目的としたSingle-MASK傾斜リソグラフィ(J19-1 マイクロメカトロニクス(1),J19 マイクロメカトロニクス)

概要

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A novel single-mask fabrication method for high-density arrayed micro-orifices and microchannels is proposed and applied for electroporation. The process is based on inclined UV lithography to expose a single layered photoresist (SU-8) coated on a patterned mask. To fabricate the proposed feature precisely, we investigated the inclined angle on exposure process and developing distance of microchannels as a function of time. Using the process, we prepared SU-8 structure with arrayed micro-orifices and microchannels, and carried out electroporation test with MEL cells to confirm the validity of the proposed system. Nuclear transport factor CFP-importinβ was fed to the cellular interior by applying the low pulsed voltage.
社団法人日本機械学会の論文
2006-09-15