M5-3 サーフェスマイクロマシン技術を用いたPZT薄膜アクチュエータの作製に関する研究(M5 アクチュエータ/フィジカルセンサ)

概要

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Micro-cantilevers with piezoelectric lead zirconate titanate (PZT) thin film have been widely investigated for various MEMS applications. However, most of them are fabricated by bulk micromachine techniques in silicon on insulator substrate. On the other hand, if micro-cantilevers could be fabricated by surface micromachine techniques, it is advantageous to arrange them in the high density array. In this study, we suggested a new simple process for fabricating PZT unimorph cantilevers by surface micromachining process. Through this process, we fabricated micro actuators with PZT thin films deposited using rf magnetron sputtering. Dielectric loss of PZT thin films are 0.02-0.06, and piezoelectric constant d_<31> calculated from measured displacement of cantilevers was -72.6 pm/V The proposed piezoelectric actuator fabrication process can be applied to various MEMS devices.
2009-10-15