2414 アクティブ・シンク法により弾性表面波モータの定在波成分の除去(J22-3 マイクロ流体素子と弾性表面波応用,J22 マイクロメカトロニクス,2005年度年次大会)

概要

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The Rayleigh wave is used to create surface elliptical wave motion for powering linear micro motors. In analysing and modeling the performance of such motors, the Rayleigh wave is typically assumed to propagated in a semi-infinite medium. However, real systems are finite and reflection of the progating wave at device boundarys or discontinuties reduces the amplitude of the surface acoustic wave. In this paper, the "active sink method" is used to cancel the reflected wave at the boundary between the free and electrodes surfaces of a linear acoustic wave motor. This method is implemented by analytically calculating the impedance of a primary Interdigit Tranducer (IDT) and actively matching it with a secondary IDT. The simulated results for proposed system are compared with that of a conventional one.
一般社団法人日本機械学会の論文
2005-09-18