D-1-4 金属基板上に成膜したPZT薄膜による圧電MEMSスキャナーミラーの研究(D-1 マイクロアクチュエータ,口頭発表:マイクロナノメカトロニクス)

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In this study, we have developed metal-based MEMS scanner mirrors driven by PZT piezoelectric thin films not only to simplify fabrication process but also to improve fracture toughness of the micro-actuators. The 2 μm-thick PZT thin films were directly deposited on preliminarily microfabricated metal-based substrates of titanium or stainless steel by RF-magnetron sputtering. We could achieve a large mechanical angle tilt of 6.21° at high resonant frequency of 35.02 kHz by low application voltage of 10V_<p-p>. Use of microfabricated metal-based substrates for the PZT deposition enables simpler process and stronger toughness of scanner mirrors compared with the conventional Si-based ones.
2011-03-18