マイクロマニピュレータの相対位置姿勢同時計測技術

概要

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We have been studying the manipulating technique for micro-particles by the micro-manipulator. In this paper, we proposed a neighboring-points confocal measurement method. This method measures the displacements at proximal two points simultaneously. This distance between proximal two points can be designed arbitrary from micrometer to millimeter order. Using these measured displacements data and the designed distance value, the attitude of the micro-manipulator can be calculated. To illuminate proximal two points, we implemented the birefringence prism that splits a pencil of rays into two beams. Moreover, this method can be applied to the relative position and attitude measurement. In this case, the half-mirror is formed on a part of the micro-manipulator. The displacements of the half-mirror surface and the sample surface are measured independently. We used the silicon nitride (Si_3N_4) membrane as the half-mirror. From the difference between these two displacements, the relative position and attitude can be obtained. We verified the principles of this proposed method and got the good results.
社団法人精密工学会の論文
2005-06-05