T1601-1-3 ガラス基板とポリマー材料を用いて製作したPolymer-MEMSミラーの駆動特性評価([T1601-1]マイクロナノメカトロニクス(1))

概要

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MEMS mirror devices are widely used in several fields. Recently, the MEMS mirror devices with torsion bars made of polymer materials have been studied for the purpose of the large deflection angle. Most of the conventional MEMS mirror devices have a substrate of a Si wafer, etched by expensive dry etching equipments. So, we propose the lower cost and the large deflection angle mirror device driven by the Lorentz force. The Polymer-MEMS mirror is composed of an inexpensive glass substrate and polymer torsion bars. To evaluate the validity of the proposed device, we measured dynamic characteristics of the fabricated mirror devices using PSD system.
2010-09-04