化学吸着単分子膜を利用したマイクロレンズアレイ製作法

概要

論文の詳細を見る
We proposed a new method of patterning a chemically adsorbed monomolecular layer on the substrate and then dropping UV cure material to form a lens shape using oil repellent effect of this film. The curvature radius of the lens was controlled by the amount of the dropped UV cure material. Using this method, a micro-lens array of various radiuses was fabricated. The formed micro-lens array shapes are transferred by the electro-plating and then the micro dies are fabricated, which are used for molding the plastic lens array. The optical characteristic of the molded micro-lens was evaluated.
社団法人電気学会の論文
2007-02-01