Integration of Chemical Sensors with LSI Technology : History and Applications
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概要
- 論文の詳細を見る
- 2012-05-01
著者
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Toshiyoshi Hiroshi
Institute Of Industrial Science The University Of Tokyo
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Toshiyoshi Hiroshi
Institute Of Industrial Sciences The University Of Tokyo
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Tixier-mita Agnes
Institute Of Industrial Sciences The University Of Tokyo
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Takahashi Takuya
Research Center For Advanced Science And Technology The University Of Tokyo
関連論文
- Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon Chip
- A Digital-to-Analog Converter of Displacement by an Integrated Micromechanism
- Fabrication of Silicon-Based Filiform-Necked Nanometric Oscillators
- Contact resistance modeling of MEMS scanner for CMOS-MEMS simultaneous simulation (集積回路)
- A Piezoelectric Quartz Microactuator for a Large Pseudo-Static Displacement
- Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware
- A Silicon Based Nanometric Oscillator for Scanning Force Microcopy Operating in the 100 MHz Range
- Fabrication of Array of Hollow Microcapillaries Used for Injection of Genetic Materials into Animal/Plant Cells
- A Built-in Vibration Sensor Using Arc-Discharged Reactive Ion Plated PZT
- Micro Roll-to-Roll Patterning Process and Its Application on Flexible Display
- Laser Breakdown 3D Display
- Multiphysics Analysis for Micro Electromechanical Systems Based on Electrical Circuit Simulator
- Micro Mechanical Acoustic Sensor toward Artificial Basilar Membrane Modeling
- Optical MEMS(Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
- The Use of Laser Burst for Volumetric Displaying Inside Transparent Liquid
- Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware
- Integration of Chemical Sensors with LSI Technology — History and Applications —
- Integration of Chemical Sensors with LSI Technology : History and Applications
- Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon Chip
- A micromachined voltage controlled oscillator using the pull-in mechanism of electrostatic actuation
- Micro-Fluidic Channel Integration on Thick-SOI LSI Device for Biological Application.