Micro-Fluidic Channel Integration on Thick-SOI LSI Device for Biological Application.

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概要

• 論文の詳細を見る

• The purpose of this article is to investigate the possibility to realize a fully integrated CMOS-Microfluidic device, the micro-fluidic channel being fabricated inside the CMOS chip, and passing underneath some micro-electrodes. The micro-channels are fabricated by isotropic deep-etching of silicon, which allows lateral etching, and then etching underneath the micro-electrodes. The electrodes are expected to be used for an all integrated system for electrical characterization of cells flowing underneath (flow impedance spectroscopy). This technology proposes an alternative to standard PDMS microfluidic channels which have limitations when applied to CMOS devices. Actually, these one have small size and have highly integrated pattern, making the alignment to the PDMS channel quite tricky. With the proposed technology, highly integrated device with micro-fluidics is obtainable, thanks to a submicron alignment precision. Moreover, it also gives possibilities of batch processing of integrated micro-fluidics on CMOS.

• 一般社団法人 電気学会の論文

著者

• MITA Yoshio

  Department of Electrical Engineering, School of Engineering, The University of Tokyo

• Pioufle Bruno

  Satie Cnrs Ens Cachan

• Takahashi Takuya

  Research Center For Advanced Science And Technology The University Of Tokyo

• Toshiyoshi Hiroshi

  Research Center for Advanced Science and Technology (RCAST), The University of Tokyo

• Pioufle Bruno

  SATIE/IFR dAlembert, École Normale Supérieure de Cachan

• Tixier-Mita Agnès

  Research Center for Advanced Science and Technology, The University of Tokyo

• Mori Isao

  Department of Electrical and Electronics Engineering, The University of Tokyo

• Français Olivier

  SATIE/IFR dAlembert, École Normale Supérieure de Cachan

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• Micro-Fluidic Channel Integration on Thick-SOI LSI Device for Biological Application.

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