Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide
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概要
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We demonstrate a simple and efficient optical coupler for vertical coupling between optical fibers and InP-based waveguides using a slant-etched mirror. The angle of the etched mirror can be controlled by using an aluminum jig with a beveled surface inserted under the substrate during RIE (reactive ion etching) of InP/InGaAsP. The off-chip coupler is fabricated simultaneously with a high-mesa waveguide with only one etching process. Coupling loss of 7.3dB between the tapered single-mode fibers is obtained within the wavelength of 1530-1570nm.
著者
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Sugiyama Masakazu
Department Of Biotechnology Graduate School Of Agriculture And Life Sciences The University Of Tokyo
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Nakano Yoshiaki
Research Center For Advanced Science And Technology (rcast) At The University Of Tokyo
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Higo Akio
Research Center For Advanced Science And Technology The University Of Tokyo
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Zaitsu Masaru
Research Center For Advanced Science And Technology The University Of Tokyo
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Kwack Myung-Joon
Research Center for Advanced Science and Technology (RCAST), The University of Tokyo
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Toshiyoshi Hiroshi
Research Center for Advanced Science and Technology (RCAST), The University of Tokyo
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Sugiyama Masakazu
Department of Electrical Engineering and Information Systems, The University of Tokyo
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Choi Sunghan
Research Center for Advanced Science and Technology (RCAST), The University of Tokyo
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Zaitsu Masaru
Research Center for Advanced Science and Technology (RCAST), The University of Tokyo
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