Fabrication of a Monolithically Integrated WDM Channel Selector Using Single Step Selective Area MOVPE and Its Characterization(Semiconductor Devices,<Special Section>Recent Advances in Integrated Photonic Devices)
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概要
- 論文の詳細を見る
An 8ch, 400GHz monolithically integrated WDM channel selector featuring an array of quantum well semiconductor optical amplifiers (SOA) and arrayed waveguidegrating demultiplexer is presented. Reduction of fabrication complexity was achieved by using a single step selective area MOVPE to realize the different bandgap profiles for the SOA array and passive region. The selective growth mask dimensions were optimized by simulation. Dry-etching with short bending radii of 200μm resulted in compact device size of 7mm×2.5mm. Static channel selection with high ON-OFF ratio of >40dB was achieved.
- 社団法人電子情報通信学会の論文
- 2007-05-01
著者
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Al Amin
Dept. Of Electronic Engineering The University Of Tokyo
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NAKANO Yoshiaki
Research Center for Advanced Science and Technology, The University of Tokyo
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Nakano Yoshiaki
Research Center For Advanced Science And Technology The University Of Tokyo
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Nakano Yoshiaki
Research Center For Advanced Science And Technology Univ. Of Tokyo
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Nakano Yoshiaki
Graduate School Of Engineering The University Of Tokyo
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Sugiyama Masaaki
R & D Laboratories-i Central R & D Bureau Nippon Steel Cotporation
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Sugiyama Masaaki
Advanced Materials & Technology Research Laboratories Nippon Steel Corporation
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Sugiyama M
Department Of Electric Engineering And Information Systems School Of Engineering The University Of T
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Sugiyama Munehiro
Ntt Interdisciplinary Research Laboratories
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Nakano Y
Research Center For Advanced Science And Technology The University Of Tokyo
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SHIODA Tomonari
Research Center for Advanced Science and Technology, The University of Tokyo
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SUGIYAMA Masakazu
The University of Tokyo
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SAKURAI Kenji
Dept. of Electronic Engineering, The University of Tokyo
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SHIODA Tomonari
Dept. of Electronic Engineering, The University of Tokyo
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SUGIYAMA Masakazu
Dept. of Electronic Engineering, The University of Tokyo
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Shioda Tomonari
Research Center For Advanced Science And Technology The University Of Tokyo
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Sakurai Kenji
Dept. Of Electronic Engineering The University Of Tokyo
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Nakano Yoshiaki
Research Center For Advanced Science And Technology (rcast) At The University Of Tokyo
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Nakano Yoshiaki
Department Of Electrical Engineering And Information Systems The University Of Tokyo
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Nakano Yukie
Research Center for Advanced Science and Technology, The University of Tokyo
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