Characterization of P- and N-Type Impurity Diffusions in GaAs from Doped Silica Films
スポンサーリンク
概要
- 論文の詳細を見る
Characteristics of p- and n-type open-tube diffusion into GaAs using zinc (Zn)- and tin (Sn)-doped spin-on silica films are investigated. This paper first describes the difference of carrier concentration profiles between both types of diffusion, and then interstitial-substitutional diffusion mechanisms are proposed. Next, the surface condition after diffusion is observed by SEM and AFM. In the case of using highly doped films, abundant surface defects are detected. However the surface condition is greatly improved by using low-doped ones. Also, the two micrographs are in good agreement. Finally, lateral diffusion length and electrical characteristics of diffused layers are discussed. It is concluded that this diffusion method is quite simple and useful for the fabrication of III-V compound semiconductor devices.
- 社団法人応用物理学会の論文
- 1995-02-28
著者
-
山田 晃
東京農工大学生物システム応用科学府
-
Okamoto Kazuya
Central Research Laboratory Nikon Corporation
-
Nakano Yoshiaki
Research Center For Advanced Science And Technology Univ. Of Tokyo
-
Nakano Y
Research Center For Advanced Science And Technology The University Of Tokyo
-
OKAMOTO Kimiharu
JEOL Limited
-
Okamoto K
Jeol Limited
-
YAMADA Atsushi
Central Research Laboratory, Nikon Corporation
-
Shimogaki Yukihiro
Faculty of Engineering, University of Tokyo
-
Nakano Yoshiaki
Faculty of Engineering, University of Tokyo
-
Tada Kunio
Faculty of Engineering, University of Tokyo
-
Shimogaki Y
Department Of Materials Engineering School Of Engineering The University Of Tokyo
-
Nakano Yoshiaki
Faculty Of Electronic Engineering The University Of Tokyo
-
Nakano Yoshiaki
Department Of Electrical Engineering And Information Systems The University Of Tokyo
-
Nakano Yukie
Research Center for Advanced Science and Technology, The University of Tokyo
関連論文
- 超音波血流映像からの肝硬変病変の特徴抽出(医用超音波,アコースティックイメージング,一般)
- Growth of Strain-Relaxed Si_C_y Films with Compositionally Graded Buffer Layers by Gas Source Molecular Beam Epitaxy
- Chemical-Bath-Deposited ZnO and Mg(OH)2 Buffer Layer for Cu(InGa)Se2 Solar Cells
- Novel In(OH)_3:Zn^ Buffer Layer for Cu(InGa)Se_2 Based Solar Cells
- Effect of ZnTe and CdZnTe Alloys at the Back Contact of 1-μm-Thick CdTe Thin Film Solar Cells
- Phosphorous Doping of Strain-Induced Si_C_y Epitaxial Films Grown by Low-Temperature Chemical Vapor Deposition
- Preferred Orientation Control of Cu(In_Ga_x)Se_2 (x≈0.28) Thin Films and Its Influence on Solar Cell Characteristics
- Effect of CdCl_2 Treatment Conditions and Stoichiometry on The Deep Level, Carrier Lifetime and Converstion Efficiency of CdTe Thin Film Solar Cells
- P-Doping into Strain-Induced Si_C_y Epitaxial Films Grown by Low Temperature Chemical Vapor Deposition
- Epitaxial Growth of Si_C_y Film by Low Temperature Chemical vapor Deposition
- Formation of pn Homojunction in Cu(InGa)Se_2 Thin Film Solar Cells by Zn Doping
- Amorphous-to-Polycrystalline Silicon Transition in Hot Wire Cell Method
- Improvement of the Electrochemical Profiling Technique of Carrier Concentration in Cu(InGa)Se_2 Thin Film Solar Cells
- High-Efficiency Amorphous Silicon Solar Cells with ZnO as Front Contact
- Improvement of Stabilized Efficiency of Amorphous Silicon Solar Cell by SiH_2Cl_2 Addition
- US2010-17 超音波B-Flow血流映像からの肝硬変疾患の特徴量抽出(医用超音波,アコースティックイメージング,一般)
- Characterization of Highly Efficient CdTe Thin Film Solar Cells by the Capacitance-Voltage Profiling Technique
- Improvement in Performances of ZnO : B/i-ZnO/Cu(InGa)Se_2 Solar Cells by Surface Treatments for Cu(InGa)Se_2
- Electrical and Structural Characterizations of Cu(InGa)Se_2 Thin Films Using Electrochemical Capacitance-Voltage Method and Focused-Ion Beam Process
- Cu(InGa)Se_2 Thin-film Solar Cells with High Resistivity ZnO Buffer Layers Deposited by Atomic Layer Deposition
- Prospects of Thickness Reduction of the CdTe Layer in Highly Efficient CdTe Solar Cells Towards 1 μm
- Molecular Beam Epitaxy and Characterization of Layered In_2Se_3 Films Grown on Slightly Misoriented (001)GaAs Substrates
- Heteroepitaxy and Multiquantum Well Structure of Layered Compound GaSe/GaS_xSe_ on (001) GaAs Substrate
- Characterization of Highly Efficient CdTe Thin Film Solar Cells by Low-Temperature Photoluminescence
- PB41 音響パルス反射法による地下円筒空洞の輪郭推定法(ポスターセッションB)
- Native Defect Control of CdTe Thin Film Solar Cells by Close-Spaced Sublimation
- Deposition of Ge_C_x Alloy on Si by Combined Low-Energy Ion Beam and Molecular Beam Epitaxial Method
- Epitaxial Growth of AgGaSe_2 for Mid-Infrared Frequency Doubling Applications
- Translational Phase Domains in the Cation Sublattice of Chalcopyrite Compounds
- 音波CT法による樹木断面音速の映像化 : 年輪による音速異方性の影響評価(一般/アコースティックイメージング)
- 音波CT法による樹木断面音速映像の性能評価(音響・超音波サブソサイエティ合同研究会)
- P3-42 音波CT法による樹木断面音速分布の映像化(ポスターセッション3(概要講演))
- 少数の送受信素子で構成した頸動脈診断用超音波反射率CT
- 照射角制限性能の高い透過型超音波逆散乱CT (特集 目覚ましい医用超音波技術の進展)
- 内部エコーによる診断情報の抽出(アコースティックイメージング・一般)
- リニアアレイ超音波逆散乱CTの実環境シミュレーション評価
- P3-J-55 照射角制限性能の高い透過型超音波逆散乱CT(医用超音波,ポスターセッション3(概要講演))
- 照射角に制限のある超音波逆散乱CT(アコースティックイメージ)
- 共役勾配法を用いた送受信器の数が制限された条件下での超音波反射率CT
- 反射透過型超音波CT装置の小型化
- Q&Aコーナー(コーヒーブレーク)
- P3-21 疎アレイ準3次元超音波逆散乱CT(ポスターセッション3,ポスター発表)
- P3-20 円弧上アレイエレメントを用いた反射透過型逆散乱CT(ポスターセッション3,ポスター発表)
- 疎アレイセンサを用いた準3次元超音波逆散乱CT
- 円弧上観測型超音波減衰率CTの再現性能向上
- 脳内超音波CTのための逆散乱画像再構成法
- レーザドップラ振動計を用いたCT計測
- 2P-18 符号変調音波の多チャンネル送受信による渦風速場のトモグラフィ計測(ポスターセッション)
- 1Pb-18 超音波相関法による開水路流量計測の評価実験(ポスターセッション)
- TWITCHIN OF STRIATED ADDUCTOR MUSCLES OF BIVALVES REGULATES 'CATCH' INTERACTION BETWEEN ACTIN AND MYOSIN FILAMENTS(Cell Biology and Morphology,Abstracts of papers presented at the 75^ Annual Meeting of the Zoological Society of Japan)
- IN VITRO RECONSTITUTION OF THE CATCH STATE USING MYOFILAMENTS FROM BIVALVE OBLIQUELY STRIATED MUSCLE(Cell Biology and Morphology,Abstracts of papers presented at the 74^ Annual Meeting of the Zoological Society of Japan)
- 2P2-11 符号変調波を用いた並列同時送受信風速トモグラフィ(ポスターセッション)
- 1P2-17 超音波トモグラフィ法による内臓脂肪面積測定の精度検証(ポスターセッション)
- 1P2-13 相関法を用いた排水管用超音波流量計測(ポスターセッション)
- 3P2b-3 直角四方向観測型超音波逆散乱トモグラフィ(ポスターセッション)
- 3P2b-2 超音波CT法による内臓脂肪測定のファントム評価実験(ポスターセッション)
- 3-03-04 超音波トモグラフィによる内臓脂肪測定の性能評価(波動伝搬・可視化技術)
- 2-03P-18 音波トモグラフィによる渦の風速場の時空間変動の映像化(ポスターセッション 2)
- P3-41 前方及び後方散乱波を同時に用いた超音波逆散乱CT法(ポスターセッション3(概要講演))
- P1-25 高推力超音波リニアモータの開発に向けたボルト締め複合振動子の振動モード解析(ポスターセッション1(概要講演))
- B-19 デコンボリューション処理を用いた高感度・高分解能な超音波パルスエコー計測法(ポスターセッション)
- Twin Formation in Cu-Ga-Se Films Grown by Molecular Beam Epitaxy under Ga-Excess Conditions (Proceedings of the 12th International Conference on Ternary and Multinary Compounds ICTMC-12)
- Photoluminescence Studies and Solar-Cell Application of CuInSe_2 Thin Films Prepared using Selenization Techniques
- Study of CuInSe_2 Formation Kinetics in the Selenization Process by Raman Spectroscopy
- Observation of Exciton-Polariton Emissions from a ZnO Epitaxial Film on the a-Face of Sapphire Grown by Radical-Source Molecular-Beam-Epitaxy : Optical Properties of Condensed Matter
- Growth of Undoped ZnO Films with Improved Electrical Properties by Radical Source Molecular Beam Epitaxy
- Electron Probe Microanalysis of Second Phases via Acceleration Voltage Dependence
- Developmemt of High-Efficiency CuIn_xGa_Se_2 Thin-Film Solar Cells by Selenization with Elemental Se Vapor in Vacuum
- Heteroepitaxy of Layered Compound InSe and InSe/GaSe onto GaAs Substrates
- Highly Stable ZnO Thin Films by Atomic Layer Deposition
- Textured ZnO Thin Films for Solar Cells Grown by a Two-step Process with the Atomic Layer Deposition Technique
- Polycrystalline Cu(InGa)Se_2 Thin-Film Solar Cells with ZnSe Buffer Layers
- Immunosuppressive Effects of Gallic Acid and Chebulagic Acid on CTL-Mediated Cytotoxicity
- Identification of Low Molecular Weight Probes on Perforin- and Fas-based Killing Mediated by Cytotoxic T Lymphocytes
- Epitaxial Growth of GaSe Films by Molecular Beam Epitaxy on GaAs(111), (001) and (112) Substrates
- Photoinduced Oxidation of Epitaxial Ga_2Se_3 Grown by Molecular Beam Epitaxy
- Defect Evaluation of Heavily P-Doped Si Epitaxial Films Grown at Low Temperature
- Control of the Arrangement of the Native Gallium Vacancies in Ga_2Se_3 on (100)GaAs by Molecular Beam Epitaxy
- Formation of ZnGa_2Se_4 Epitaxial Layer during Molecular Beam Epitaxial Growth of Ga_2Se_3 on ZnSe
- Raman Study of Epitaxial Ga_2 Se_3 Films Grown by Molecular Beam Epitaxy
- Optical Anisotropy of Vacancy-Ordered Ga_2Se_3 Grown by Molecular Beam Epitaxy
- 自動分析装置用圧電バイモルフ撹拌子の開発
- Metalorganic Chemical Vapor Deposition of ZnO Using D_2O as Oxidant
- Optimization of ZnO Films for Amorphous Silicon Solar Cells
- Large-Area ZnO Thin Films for Solar Cells Prepared by Photo-Induced Metalorganic Chemical Vapor Deposition
- Mobility Enhancement of Textured ZnO Films by Ultraviolet Light Irradiation
- Textured ZnO Thin Films for Solar Cells Grown by Metalorganic Chemical Vapor Deposition
- 超音波パルスエコ-信号に含まれる電気音響変換ひずみ除去信号処理
- Heavily P-Doped (>10^ cm) Silicon Films Grown by Photochemical Vapor Deposition at a Very Low Temperature of 250℃
- Photochemical Vapor Deposition of Si/Si_Ge_x Strained Layer Superlattices at 250℃ : Silicon Heterostructures(Solid State Devices and Materials 1)
- Epitaxial Growth of Silicon by Plasma Chemical Vapor Deposition at a Very Low Temperature of 250℃
- Tight-Binding Molecular Dynamics Study of Hydrogen Molecule Inside Silicon Crystal
- Tight-binding Molecular Dynamics Simulation of Desorbed SiO Molecule during the Oxidation of Si(111) Surface
- Quantum Chemical Study on the Interaction of NF3 with Si
- Tight-Binding Molecular Dynamics Simulation of Desorbed SiO Molecule during the Oxidation of Si(111) Surface
- ア***ロープを用いた組織超音波CTの評価実験
- 医療用ア***ローブを用いた超音波定量CT計測
- 1P269 Single binding unit of the 'catch' reconstituted in vitro with myosin and twitchin purified from bivalve adductor muscle(9. Molecular motor (I),Poster Session,Abstract,Meeting Program of EABS & BSJ 2006)
- 生体音速の逆散乱定量CT画像計測 : 高精度化並びにその性能評価 (医用超音波)
- 超音波回折トモグラフィ法による3次元温度分布計測に関する検討