Optimization of Polysilane Structure as Fast-Etching Bottom Antireflective Coating for Deep Ultraviolet Lithography

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-11-15

著者

• HAYASE Shuji

  Graduate School of Life Science and System Engineering, Kyushu Institute of Technology

• Sato Yasuhiko

  Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation

• Matsuyama H

  Process And Manufacturing Engineering Center Toshiba Corporation

• Sato Y

  Nagaoka Univ. Technol. Nagaoka Jpn

• MATSUYAMA Hideto

  Process and Manufacturing Engineering Center, Toshiba Corporation

• ONISHI Yasunobu

  Process and Manufacturing Engineering Center, Toshiba Corporation

• NAKANO Yoshihiko

  Research and Development Center, Toshiba Corporation

• Sato Yuzuru

  Seiko Epson Corp. Research And Development Div.

• Sato Y

  Department Of Metallurgy Graduate School Of Engineering Tohoku University

• Nakano Yoshiaki

  Research Center For Advanced Science And Technology Univ. Of Tokyo

• Nakano Yoshiaki

  Graduate School Of Engineering The University Of Tokyo

• Matsuyama Hideto

  Process And Manufacturing Engineering Center Toshiba Corporation

• Onishi Yasunobu

  Process & Manufacturing Engineering Center Toshiba Corporation Semiconductor Company

• Onishi Yasunobu

  Microelectronics Engineering Laboratories Toshiba Corporation

• Onishi Yasunobu

  Process & Manufacturing Engineering Center Semiconductor Company Toshiba Corporation

• Sato Yasuhiko

  Process & Manufacturing Engineering Center Toshiba Corporation Semiconductor Company

• Sato Y

  Ntt Microsystem Integration Laboratories

• Nakano Y

  Research Center For Advanced Science And Technology The University Of Tokyo

• Hayase S

  Graduate School Of Life Science And Systems Engineering Kyushu Institute Of Technology

• Nakano Yoshihiko

  Research And Development Center Toshiba Corporation

• Nakano Yoshiaki

  Department Of Electrical Engineering And Information Systems The University Of Tokyo

• Nakano Yukie

  Research Center for Advanced Science and Technology, The University of Tokyo

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