Fabrication of TE/TM Mode Splitter Using Completely Buried GaAs/GaAlAs Waveguide

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概要

• 論文の詳細を見る

• A GaAs/GaAlAs-system TE/TM mode splitter using the mode interference principle is described. Single- and double-mode waveguides are patterned by reactive ion etching after the first molecular beam epitaxy. They are then completely buried by liquid-phase epitaxy, which enables low loss propagation due to side-wall smoothness, because of the thermal deformation effect. For achieving low loss characteristics in this mode splitter, the surface treatment process before crystal growth and S-bend waveguide mask formation procedure are also optimized. Propagation loss of the single-mode waveguide is less than 1.0 dB/cm. In order to secure birefringence of the waveguide for mode splitting, upper and lower GaAlAs-cladding mol fractions are different. Finally, the fabricated device achieves the TE/TM mode splitting ratio of 8.2 dB for both polarizations.

• 社団法人応用物理学会の論文
• 1995-01-15

著者

• NAKANO Yoshiaki

  Department of Surgery, NTT West Osaka Hospital

• Okamoto Kazuya

  Central Research Laboratory Nikon Corporation

• TADA Kunio

  Department of Electronic Engineering, The University of Tokyo

• Tada Kunio

  Department Of Electronic Engineering Faculty Of Engineering University Of Tokyo

• Nakano Yoshiaki

  Research Center For Advanced Science And Technology Univ. Of Tokyo

• Nakano Y

  Research Center For Advanced Science And Technology The University Of Tokyo

• DOI Masaaki

  Central Research Center Nikon Corporation

• Doi Masaaki

  Central Research Laboratory Nikon Corporation

• OKAMOTO Kimiharu

  JEOL Limited

• Nakano Yoshiaki

  Department Of Surgery Ntt West Osaka Hospital

• Okamoto K

  Jeol Limited

• IRITA Takeshi

  Central Research Laboratory, Nikon Corporation

• Irita T

  Nikon Corp. Tokyo Jpn

• Nakano Yoshiaki

  Department Of Electrical Engineering And Information Systems The University Of Tokyo

• Tada Kunio

  Department Of Electronic Engineering Faculty Of Engineering The University Of Tokyo

• Nakano Yukie

  Research Center for Advanced Science and Technology, The University of Tokyo

• Tada Kunio

  Department of Electrical and Computer Engineering, Graduate School of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan

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