Application of Modern Control Theory to Temperature Control of the MBE System
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概要
- 論文の詳細を見る
A molecular beam epitaxy control system, whereby one microprocessor manages all the objects, has been constructed. The model-following algorithm, which is one of the applications of modern control theory, has been adopted instead of the conventional PID algorithm in order to improve the dynamic response of the temperature. It has been confirmed by computer simulation and measurement that the model-following algorithm is significantly effective especially when the set temperature is to be changed as a function of time. An application of the model-following algorithm to device fabrication has also been demonstrated.
- 社団法人応用物理学会の論文
- 1990-03-20
著者
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Tada Kunio
Department Of Electronic Engineering Faculty Of Engineering University Of Tokyo
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Chan Y
Nanyang Technol. Univ. Singapore
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Ishikawa Takuya
Department Of Electronic Engineering The University Of Tokyo
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Nakano Yoshiaki
Department Of Electrical Engineering The University Of Tokyo
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CHAN Yuen
Department of Electronic Engineering, the University of Tokyo
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Nakano Yoshiaki
Department Of Electrical Engineering And Information Systems The University Of Tokyo
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Tada Kunio
Department Of Electronic Engineering Faculty Of Engineering The University Of Tokyo
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Tada Kunio
Department of Electrical and Computer Engineering, Graduate School of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan
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