Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect
スポンサーリンク
概要
- 論文の詳細を見る
A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1-mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-08-15
著者
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Yokoi Hideki
Department of Biochemistry, College of Agriculture, Kyoto Prefectural University
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Ohtsuka Takafumi
Department Of Analytical Chemistry School Of Pharmacy Tokyo University Of Pharmacy And Life Sciences
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Sakai Takashi
Department Of Applied Chemistry Faculty Of Engineering Okayama University
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Mizumoto Tetsuya
Department Of Eee Tokyo Institute Of Technology
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Nakano Yoshiaki
Department Of Electrical Engineering And Information Systems The University Of Tokyo
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Sakai Takashi
Department of Electrical and Electronic Engineering, Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-ku, Tokyo 152-8552, Japan
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Ohtsuka Takafumi
Department of Electronic Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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