Processing and Functional Evaluation of Titanium Thin Films for Biomimetic Micro Actuator

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概要

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• Titanium (Ti) thin films were created on glass and Pb(Zr,Ti)O_3 (PZT) substrates using magnetic RF sputtering apparatus. Nano-indentation tests were carried out to study the influence of the Ti thin layer on piezoelectric properties. The piezoelectric properties of the PZT plate and a Ti sputtered one were also measured by laser Doppler vibrometer. Furthermore, some characteristics, such as crystalline structure, depth profiles, and surface roughness of the films were observed by means of an atomic force microscope (AFM). Main conclusions obtained in this study are summarized as follows: (1) From detailed observation and analytical results of AFM, the surface roughness, R_a, tends to increase as Ti film thickness increases. (2) Some of the mechanical properties, such as reduced modulus E, and hardness H obtained from nano-indentation tests, are significantly related to film thickness. (3) The validity of piezoelectric finite element analysis (ANASYS program) for deformation of a piezoelectric material was investigated. As a result, piezoelectric response properties are present in as-received PZT specimens and Ti-sputtered PZT specimens. Experimental and FE analytical results indicate that the piezoelectric coefficient is significantly influenced by Ti layer.

• 一般社団法人日本機械学会の論文
• 2005-10-15

著者

• Sakai Takashi

  Department Of Applied Chemistry Faculty Of Engineering Okayama University

• Nakamachi Eiji

  Department Of Mechanical Engineering Osaka Institute Of Technology

• HOSHIAI Sodai

  Graduate School of Medical, Tottori University

• Sakai Takashi

  Department Of Mechanical Engineering Takamatsu National Collega Of Technology

• Hoshiai Sodai

  Graduate School Of Medical Tottori University

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