Analysis of GaInAsP Surfaces by Contact-Angle Measurement for Wafer Direct Bonding with Garnet Crystals

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概要

• 論文の詳細を見る

• GaInAsP surfaces with various treatments were analyzed by contact-angle measurement for wafer direct bonding between GaInAsP and garnet crystals. The contact angle of a water droplet was measured to estimate the hydrophilicity of the wafer surfaces. The most hydrophilic surface was obtained after an O_2 plasma activation process. Direct bonding was successfully achieved between GaInAsP activated by O_2 plasma and garnet crystals.

• 社団法人応用物理学会の論文
• 1999-08-15

著者

• Shimizu Masahiro

  Ulsi Development Center Mitsubishi Electric Corporation

• Shimizu M

  Advanced Industrial Science And Technology (aist) Power Electronics Research Center

• Shimizu Mitsuaki

  Power Electronics Research Center National Institute Of Advanced Industrial Science And Technology

• Yokoi Hideki

  Department of Biochemistry, College of Agriculture, Kyoto Prefectural University

• Yokoyama H

  Tokyo Inst. Technol. Yokohama Jpn

• Yokoi H

  Tokyo Inst. Technol. Tokyo Jpn

• Yokoi Hideki

  Department Of Electrical And Electronic Engineering Graduate School Of Science And Engineering Tokyo

• Nakano Yoshiaki

  Research Center For Advanced Science And Technology Univ. Of Tokyo

• Nakano Yoshiaki

  Graduate School Of Engineering The University Of Tokyo

• Yokoi H

  Graduate School Of Science And Engineering Tokyo Institute Of Technology

• Nakano Y

  Research Center For Advanced Science And Technology The University Of Tokyo

• Nakano Yoshiaki

  Department Of Surgery Ntt West Osaka Hospital

• Shimizu Masafumi

  Department Of Chemistry Faculty Of Science Kyoto University

• Futakuchi N

  Univ. Tokyo Tokyo Jpn

• Futakuchi Naoki

  Department Of Electronic Engineering University Of Tokyo

• Mizumoto T

  Tokyo Inst. Technol. Tokyo Jpn

• Mizumoto Tetsuya

  Department Of Eee Tokyo Institute Of Technology

• Waniishi Takashi

  Department Of Electrical And Electronic Engineering Graduete School Of Science And Engineering Tokyo

• Kaida Noriaki

  Department of Electronic Engineering, School of Engineering, The University of Tokyo

• Kaida Noriaki

  Department Of Electronic Engineering School Of Engineering The University Of Tokyo

• Shimizu Masafumi

  Department Of Chemistry And Biochemistry Graduate School Of Engineering Kyushu University

• Nakano Yoshiaki

  Department Of Electrical Engineering And Information Systems The University Of Tokyo

• Yokoi H

  Department Of Electrical And Electronic Engineering Graduete School Of Science And Engineering Tokyo

• Nakano Yukie

  Research Center for Advanced Science and Technology, The University of Tokyo

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