Identification of Surface Atoms of LiGaO_2(001) Substrate for Hexagonal GaN Film by Coaxial Impact Collision Ion Scattering Spectroscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-06-01
著者
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向田 昌志
山形大学工学部電気電子工学科
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Mukaida Masashi
Kyushu Univ. Fukuoka Jpn
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Shinohara Masanori
NTT Atsugi Electrical Communication Laboratories
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Hayashi Shinji
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kobe University
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Shimizu Mitsuaki
Power Electronics Research Center National Institute Of Advanced Industrial Science And Technology
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Ishii Takao
Ntt System Electronics Laboratories
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Hayashi S
Department Of Electrical And Electronics Engineering Faculty Of Engineering Kobe University
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Hayashi Shigenori
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
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Hayashi Shigenori
Faculty Of Engineering Osaka University
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MUKAIDA Masashi
NTT System Electronics Laboratories
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Nishihara T
Av Core Technology Development Center Matsushita Electric Industrial Co. Ltd.
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NISHIHARA Takaharu
Surface Analysis and Semiconductor Equipment Department, Shimadzu Corporation
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HAYASHI Shigeki
Surface Analysis and Semiconductor Equipment Department, Shimadzu Corporation
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SHINOHARA Makoto
Surface Analysis and Semiconductor Equipment Department, Shimadzu Corporation
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Shinohara M
Shimadzu Corporation
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Shinohara M
Surface Analysis And Semiconductor Equipment Department Shimadzu Corporation
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向田 昌志
九州大学・大学院工学研究院・材料工学部門
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Nishihara Takashi
Optical Disk Systems Development Center Matsushita Electric Industrial Co. Ltd.
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