^<31>P Nuclear Magnetic Resonance Study of Local Bonding Configuration of Phosphorus in Amorphous Silicon-Hydrogen-Phosphorus Alloys
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1987-12-20
著者
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Yamasaki Satoshi
Joint Research Center For Atom Technology-national Institute For Advanced Interdisciplinary Research
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Yamasaki S
National Inst. Advanced Interdisciplinary Res. Tsukuba Jpn
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Hayashi Shigenobu
National Institute Of Materials And Chemical Research
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MATSUDA Akihisa
Electrotechnical Laboratory
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TANAKA Kazunobu
Electrotechnical Laboratory
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Yamasaki S
Joint Res. Center For Atom Technol. (jrcat) Tsukuba Jpn
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Yamasaki S
Nec Corp. Kanagawa Jpn
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Hayashi Shinji
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kobe University
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HAYAMIZU Kikuko
National Institute of Materials and Chemical Research
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YAMASAKI Satoshi
Electrotechnical Laboratory
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YAMASAKI Shuichi
Superconducting Sensor Laboratory
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Hayashi S
Department Of Electrical And Electronics Engineering Faculty Of Engineering Kobe University
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Hasezaki Kazuhiro
Mitsubishi Heavy Industries Ltd.
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Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
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Hayashi Shigenori
Faculty Of Engineering Osaka University
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Hayashi Shigenobu
National Chemical Laboratory For Industry
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Hayamizu K
National Institute Of Materials And Chemical Research
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Hayamizu Kikuko
National Chemical Laboratory For Industry
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