Growth Processes of GaAs Grown by Atomic Layer Epitaxy Revealed by Atomic Force Microscopy

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-09-15

著者

• Inoue N

  National Defense Acad. Yokosuka Jpn

• Inoue N

  Oki Electric Ind. Co. Ltd. Tokyo Jpn

• Shinohara Masanori

  NTT Atsugi Electrical Communication Laboratories

• Shinohara Masanori

  Ntt Lsi Laboratories

• Inoue Naohisa

  Ntt Lsi Laboratories

• Yokoyama H

  Electrotechnical Lab. Ibaraki Jpn

• Shinohara M

  Shimadzu Corporation

• TANIMOTO Masafumi

  NTT LSI Laboratories

• YOKOYAMA Haruki

  NTT LSI Laboratories

• Shinohara M

  Surface Analysis And Semiconductor Equipment Department Shimadzu Corporation

• Tanimoto M

  Ntt Lsi Laboratories

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