Quantum Interferometric Spectroscopy: A Novel Technique for Nanometer-Scale Characterization of Heterostructures
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概要
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We propose quantum interferometric spectroscopy (QIS), a novel technique for characterizing heterostructures. Theoretical consideration of tunneling currents of a double-barrier (DB) structure utilizing QIS revealed that individual structural fluctuations of DB structure which cause current differences can be precisely specified. We applied QIS to analyze local current-voltage spectra of DB structures measured by a scanning force microscope using a current-voltage spectra method. We demonstrated that QIS can detect a one-monolayer fluctuation in thickness and fluctuation of less than 0.01 in In mole fraction in the InGaAs well layer on a nanometer-scale.
- 社団法人応用物理学会の論文
- 1995-08-30
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