Properties of Highly Oriented Ta_2O_5 on Metal Electrodes
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概要
- 論文の詳細を見る
- 1997-09-16
著者
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Chen Shih-chang
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Inoue N
National Defense Acad. Yokosuka Jpn
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Inoue N
Oki Electric Ind. Co. Ltd. Tokyo Jpn
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Chen S‐c
Advanced Module Technology Division Taiwan Semiconductor Manufacturing Company
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YOSHIMARU Masaki
VLSI R&D Center, OKI Electric Industry Co., Ltd.
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KISHIRO Koichi
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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INOUE Nobuhiko
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Kishiro Koichi
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Yoshimaru Masaki
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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