The Double-Sided Rugged Poly Si (DSR) Technology for High Density DRAMs
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概要
- 論文の詳細を見る
The Double-Sided Rugged poly Si (DSR) technology has been developed for high density DRAMs. The DSR technology was achieved using transformation of rugged poly Si caused by ion implantation. The DSR can increase the surface area of the storage electrode, because it has rugged surfaces on both upper and lower sides. The 2-FINs STC (STacked Capacitor cell) with DSR was fabricated in the cell size of 0.72μm^2, and it is confirmed that the DSR can increase the surface area 1.8 times larger than that of smooth poly Si. It is expected that 25 fF/bit is obtained with a 300 nm-thick storage electrode. These effects show that sufficient capacitance for 256 Mb DRAMs is obtained with a low storage electrode. It is confirmed that there is no degradation in C-V and I-V characteristics. Moreover, the DSR needs neither complicated process steps nor special technologies. Therefore, the DSR technology is one of the most suitable methods for 256 Mb DRAMs and beyond.
- 社団法人電子情報通信学会の論文
- 1995-03-25
著者
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Tamura H
R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.
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Ino Masayoshi
Oki Electric Industry Co. Ltd. Vlsi Rampd Center
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Onoda H
Ulsi Laboratory Mitsubishi Electric Corporation
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Onoda Hiroshi
Oki Electric Industry Co. Ltd. Lsi Production Division
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Tamura H
Department Of Computer Science And Electronics Kyushu Institute Of Technology
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Tamura Hitomi
Network Design Research Center Kyushu Institute Of Technology
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Tamura Hitoshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Onoda H
Kyoto Univ. Kyoto Jpn
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Ogihara Hidetoshi
OKI Electric Industry Co., Ltd. VLSI RampD Center
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Yoshimaru Masaki
OKI Electric Industry Co., Ltd. VLSI RampD Center
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Takase Shunji
OKI Electric Industry Co., Ltd. VLSI RampD Center
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Kurogi Hiroki
OKI Electric Industry Co., Ltd. VLSI RampD Center
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Tamura Hiroyuki
OKI Electric Industry Co., Ltd. VLSI RampD Center
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Kita Akio
OKI Electric Industry Co., Ltd. VLSI RampD Center
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Kita A
Oki Electric Industry Co. Ltd. Vlsi Rampd Center
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Takase S
Oki Electric Industry Co. Ltd. Vlsi Rampd Center
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Kurogi Hiroki
Oki Electric Industry Co. Ltd. Vlsi Rampd Center
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Yoshimaru Masaki
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Ogihara Hidetoshi
Oki Electric Industry Co. Ltd. Vlsi Rampd Center
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