Formation of Titanium Nitride/Titanium Silicide by High Pressure Nitridation in Titanium/Silicon

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-11-15

著者

• 原 徹

  法政大 工

• HARA Tohru

  Electrical Engineering, Hosei University

• Chen Shih-chang

  Vlsi R&d Center Oki Electric Industry Co. Ltd.

• Hara T

  Kanagawa Univ. Yokohama Jpn

• Hara Tohru

  Electrical Engineering Hosei University

• ENDO Nobuyuki

  National Agricultural Research Center for Kyushu Okinawa Region (KONARC)

• TAMURA Hiroyuki

  VLSI R&D Center, Oki Electric Industry Co. Ltd.

• KINOSHITA Kei

  Electrical Engineering, Hosei University

• INOUE Ken

  Electrical Engineering, Hosei University

• ENDO Nobuyuki

  Electrical Engineering, Hosei University

• NAKAMURA Shigeaki

  M. SETEK Co., Lid.

• Chen S‐c

  Advanced Module Technology Division Taiwan Semiconductor Manufacturing Company

• Kinoshita K

  Assoc. Super‐advanced Electronics Technol. Yokohama Jpn

• Inoue K

  Biological Institute And Herbarium Faculty Of Science Shinshu University

関連論文

• Reflow of PSG Layers by Halogen Lamp Short Duration Heating Technique
• Low Resistance Al/Si Ohmic Contacts on Boron Implanted Shallow p^+ Si Layers Formed by Halogen Lamp Annealing
• Contact Resistance of Al/Si Ohmic Electrodes Formed by Rapid Lamp Sintering.
• Al-Si-Cu半導体超LSI電極スパッタリング膜の〈111〉結晶軸配向性
• InGaN/GaN Light-Emitting Diodes with Rapidly Thermal-Annealed Ni/ITO p-Contacts
• Damage Formed by Si^+ Implantation in GaAs
• Rapid Heating Reflow of Phosphosilicate Glass Enhanced by As Ion Implantation
• Barrier Effects of Tungsten Infer-Layer for Aluminum Diffusion in Aluminum/Silicon Ohmic-Contact System
• Properties of Titanium Layers Deposited by Collimation Sputtering
• Influence of photoperiod on attractiveness and pheromone contents of the bean bug, Riptortus pedestris (Heteroptera: Alydidae)
• Possible function of Piezodorus hybneri (Heteroptera: Pentatomidae) male pheromone : Effects of adult age and diapause on sexual maturity and pheromone production
• Ambiguous response of Riptortus clavatus (Heteroptera : Alydidae) to different blends of its aggregation pheromone components
• A supplemental component of aggregation attractant pheromone in the bean bug Riptortus clavatus(Thunberg)(Heteroptera: Alydidae), related to food exploitation
• Threshold Voltage Instability in nMOSFETs with HfSiO/SiO_2 High-k Gate Stacks
• CMP後の汚染Cuの洗浄に関する検討
• 高エネルギーイオン注入および高ドーズ水素イオン注入の応用
• パターン平坦化研磨プロセスの評価技術(機械的プラナリゼーション技術)
• 1/4ミクロンプロセスに用いるオーミック電極と配線技術
• Al-Si-Cu配線膜の(111)面からの傾きとこれに影響を与えるCu高濃度層
• DC プラズマドーピング法 : 高キャリア濃度p^+ 層の形成
• Stress in Al-Sc Interconnection Layers
• Silicidation Reaction and Stress in Ti/Si
• Formation of Titanium Nitride/Titanium Silicide by High Pressure Nitridation in Titanium/Silicon
• Properties of Titanium Nitride Films for Barrier Metal in Aluminum Ohmic Contact Systems
• Synthesis of Superconducting T'-(La_Ce_x)_2CuO_4
• Crystal Structure of Low Oxygen-Defect Tetragonal Ba_2YCu_3O_
• Crystal Structure and Superconducting Properties of BaPb_Bi_xCu_yO_
• Applicability of TiN Adhesion Layer Formed by Nitridation of Sputtered Ti Film to Blanket CVD-W Contact Filling
• Phenomenological Interpretation of Excimer Laser Ablation of Single-Crystal Oxides (MgO, SrTiO_3 and LaAlO_3)
• Damage Formed on Silicon Surface by Helicon Wave Plasma Etching
• ヘリコン波型プラズマエッチングによりSi表面に導入されるダメージの評価
• RBS法によるSrTiO3高誘電体膜の組成測定
• MOSFET特性の自動測定
• 銅めっき膜配線層の低比抵抗化--めっき液の純度と添加剤の効果
• 銅めっき配線層のCMP (特集 半導体プロセス技術のイノベーション) -- (CMP関連技術の最新トピックスを追う)
• Reduction of Pinhole Leakage Current of SrTiO_3 Films by ArF Excimer Laser Deposition with Shadow Mask ("Eclipse Method")
• Improved Surface Smoothness of YBa_2Cu_3O_y Films and Related Multilayers by ArF Excimer Laser Deposition with Shadow Mask "Eclipse Method"
• Barrier Properties for Oxygen Diffusion in a TaSiN Layer
• Damage Induced by Electron Cyclotron Resonance Plasma Etching on Silicon Surface
• 浅い接合形成 (ハ-フミクロン以降の超LSIプロセス材料とその関連プロセス)
• Dose and Damage Measurements in Low Dose Ion Implantation in Silicon by Photo-Acoustic Displacement and Minority Carrier Lifetime
• A new component of attractive aggregation pheromone in the bean bug, Riptortus clavatus(Thunberg)(Heteroptera: Alydidae)
• Electrical and Crystallographic Properties of Sputtered-Pb(Zr,Ti)O_3 Films Treated by Rapid Thermal Annealing
• Measurement of the Delamination of Thin Silicon and Silicon Carbide Layers by the Multi-Wavelength Laser Ellipsometer
• Effect of Composition on the Stability of Liposomal Irinotecan Prepared by a pH Gradient Method
• Structure and Electrical Properties of Thin Ta_2O_5 Deposited on Metal Electrodes
• Properties of Highly Oriented Ta_2O_5 on Metal Electrodes
• Carbon Ion Implantation in GaAs
• Thermal Stability in Al/Ti/GaAs Schottky Barrier
• Induced resistance to the common cutworm, Spodoptera litura(Lepidoptera: Noctuidae) in three soybean cultivars
• Damage Formed by Plasma Boron Doping in Silicon
• Thermal Stability and Interfacial Reaction of Barrier Layers with Low-Dielectric-Constant Fluorinated Carbon Interlayer
• Interfacial Reaction in Polycide MOS Gate Structure Employing CVD Tungsten Silicide
• Capless Rapid Thermal Annealing of Silicon Ion Implanted Gallium Arsenide
• Notes on the Pollination of Cypripedium macranthos var. speciosum and Dactylorhiza aristata (Orchidaceae)
• Seasonal synchrony between pheromone trap catches of the bean bug, Riptortus pedestris (Heteroptera : Alydidae) and the timing of invasion of soybean fields
• Resistivity of Thin Copper Interconnection Layers
• Damage Depth Profiles in Jon-Implanted Silicon by the Photoacoustic Displacement Technique

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